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Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

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Basic Information

Model NO.:CY-MSP300S-3RF
Coating:Vacuum Coating
Substrate:Steel
Certification:CE
Condition:New
Sample Stage:Dia. 185mm
Heating Temp:Max 500℃
Rotate Speed:1-20rpm Adjustable
Chamber Material:Stainless Steel
Production Capacity:100 pieces/Month
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Packaging & Delivery

Package Size:110.00cm * 100.00cm * 130.00cm
Gross Weight:360.000kg
Package Type:Wooden Case
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Product Description

Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

The Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular, and customizable. There are 1-inch or 2-inch magnetron targets for choice. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supplies, suitable for the preparation of non-metal materials. Three targets meet the needs of multi-layer or multiple coatings. Various types of power supply are available from 300W to 1000W specifications.

Advanced Control: The coater is equipped with two-channel high-precision mass flowmeters (customizable up to four). It features advanced turbomolecular pump sets with an ultimate vacuum of up to 1.0E-5Pa. The system allows chamber access without shutting down the pump, significantly improving efficiency.

Applications: Ideal for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, and hard films. Its compact size and ease of operation make it ideal for laboratory research.

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Technical Parameters

Sample Stage Size: φ185mm | Heating: Max 500ºC | Accuracy: ±1ºC | Rotation: 1-20rpm
Sputtering Targets Quantity: 3 Heads (2" standard, 1" optional) | Cooling: Water Cooled | Flow: 10L/min
Vacuum Chamber Size: φ300mm×300mm | Material: Stainless Steel | Window: φ100mm | Top Open
Gas Control 2 Channels Mass Flowmeter (100sccm), customizable range
Vacuum System Molecular Pump: 600L/S | Backing Pump: Rotary Vane | Ultimate Vacuum: 1.0E-5Pa
Power Supply RF Power: 300W × 3 | Voltage: AC 220V 50/60Hz
Dimensions/Weight Size: 600mm×650mm×1280mm | Total Weight: 300kg | Total Power: 2.5KW
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Detailed Photos

Other Magnetron Sputtering Coaters

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Research & Manufacturing

Specializing in the development and production of laboratory technology research equipment since 2005. Products include laboratory sintering equipment, coating equipment, and analytical instruments, exported to over 25 countries including the United States and Europe.

Frequently Asked Questions

Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing.
How is the product after-sales service system?
The product warranty period is 12 months with lifetime maintenance provided. Our professional departments respond within 24 hours to resolve technical issues.
How long is the delivery time for standard and customized orders?
In-stock goods take 5-10 days. Customized instruments usually take 30-60 days depending on the specific requirements.
How do you handle different power supply and plug requirements?
We supply transformers and plugs according to your local requirements and the specific power standards of your country.
What are the available payment methods?
We accept T/T, L/C, D/P, and other standard trade payment methods.
How are the goods packaged and what are the delivery methods?
Goods are packed in standard export fumigation wooden boxes. Delivery is available via express, air, or sea shipping based on customer needs.

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